Focus-based depth estimation in the SEM

C. Dahmen

doi:10.1117/12.807274

17 November 2008 Focus-based depth estimation in the SEM

C. Dahmen

Proceedings Volume 7266, Optomechatronic Technologies 2008; 72661O (2008) https://doi.org/10.1117/12.807274
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

Depth estimation in the scanning electron microscope (SEM) is an important topic especially for automation purposes. The SEM only delivers two-dimensional (2D) images, which makes manipulation processes difficult. In spite of the high depth of focus in the SEM, it is still possible to use depth from focus as a depth estimation technique for nanomanipulation applications. This article deals with the extraction of depth information from SEM images using focus-based methods, and possibilities to improve the performance of these algorithms. A new approach is presented, combining 2D object tracking with focus-based depth estimation methods in order to obtain a possibility for limited three-dimensional tracking.

Citation Download Citation

C. Dahmen "Focus-based depth estimation in the SEM", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72661O (17 November 2008); https://doi.org/10.1117/12.807274

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