Fiber optics low-coherence IR interferometry for defense sensors manufacturing

Wojtek J. Walecki; Fanny Szondy

doi:10.1117/12.818381

30 April 2009 Fiber optics low-coherence IR interferometry for defense sensors manufacturing

Wojtek J. Walecki, Fanny Szondy

Proceedings Volume 7322, Photonic Microdevices/Microstructures for Sensing; 73220K (2009) https://doi.org/10.1117/12.818381
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We present novel fiber optics low coherence interferometer apparatus, and novel probe for in-situ characterization of semiconductor structures for IR detector manufacturing. Probe does not exhibit polarization, or strain sensitivity observed in earlier invented systems. In addition it is demonstrated to be able to operate with varying length of optical fibers.

Citation Download Citation

Wojtek J. Walecki and Fanny Szondy "Fiber optics low-coherence IR interferometry for defense sensors manufacturing", Proc. SPIE 7322, Photonic Microdevices/Microstructures for Sensing, 73220K (30 April 2009); https://doi.org/10.1117/12.818381

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