Two-fluid cleaning technology for advanced photomask

Tsutomu Kikuchi; Nobuo Kobayashi; Yoshiaki Kurokawa; Harumichi Hirose; Mikio Nonaka

doi:10.1117/12.830602

11 May 2009 Two-fluid cleaning technology for advanced photomask

Tsutomu Kikuchi, Nobuo Kobayashi, Yoshiaki Kurokawa, Harumichi Hirose, Mikio Nonaka

Proceedings Volume 7379, Photomask and Next-Generation Lithography Mask Technology XVI; 73791Y (2009) https://doi.org/10.1117/12.830602
Event: Photomask and NGL Mask Technology XVI, 2009, Yokohama, Japan

Abstract

Along with the increased miniaturization of electronic devices, two-fluid cleaning technology is garnering the spotlight as a solution for the manufacturing process of Photomask. This is because it is now known that implementing energy control of the particles that are sprayed on the substrate allows cleaning of miniature patterns. However, it is not yet clear just how miniature of a pattern is cleanable with two-fluid cleaning technology. This study discusses mechanisms to miniaturize the droplets created by a two-fluid nozzle. In addition, this study also considers the impact of droplet size on pattern damage to the Photomask and speaks on the potential for applying two-fluid cleaning technology in the future.

Citation Download Citation

Tsutomu Kikuchi, Nobuo Kobayashi, Yoshiaki Kurokawa, Harumichi Hirose, and Mikio Nonaka "Two-fluid cleaning technology for advanced photomask", Proc. SPIE 7379, Photomask and Next-Generation Lithography Mask Technology XVI, 73791Y (11 May 2009); https://doi.org/10.1117/12.830602

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available