Nonlinear control of maglev positioning stage

Wei-Ming Wang; Shu-Yuan Ma; Wen-Qiang Wang; Dian-Chao Li

doi:10.1117/12.885306

28 December 2010 Nonlinear control of maglev positioning stage

Wei-Ming Wang, Shu-Yuan Ma, Wen-Qiang Wang, Dian-Chao Li

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75441H (2010) https://doi.org/10.1117/12.885306
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Magnetic-levitation (maglev) positioning stage is a system with complex nonlinear, strong coupling and low damping. This research focused on the control algorithm and the effect of eddy current damper applied to the system which consists of a moving table, four Halbach permanent magnetic arrays, four stators and displacement sensors. All of the magnetic arrays are fixed to the bottom of the moving table. To avoid the occurrence of oscillation while the stage is being positioned, a permanent magnet set which served as an eddy current damper was added to the system; and it is proved through theoretical analysis that the damping force generated by the eddy current damper is proportional to the movement speed of the table. A motion control mathematical model including the segment of an eddy current damper was built, and the nonlinear controller of the system was given based on the theory of differential geometry decoupling. Simulation results show that decoupling control of movement the moving parts can be realized in horizontal and vertical directions.

Citation Download Citation

Wei-Ming Wang, Shu-Yuan Ma, Wen-Qiang Wang, and Dian-Chao Li "Nonlinear control of maglev positioning stage", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441H (28 December 2010); https://doi.org/10.1117/12.885306

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