Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica; Severin Waldis; Frederic Zamkotsian; Patrick Lanzoni; Wilfried Noell; Nico de Rooij

doi:10.1117/12.841547

16 February 2010 Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940P (2010) https://doi.org/10.1117/12.841547
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for studying the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. A first sample of MEMS-based programmable reflective slit masks with elements of size 200×100 μm² has been successfully tested in cryogenic conditions at 92 K. Devices of larger size were microfabricated, the largest chip measures 25×22 mm² and is composed of 200×100 electrostatic actuated micromirrors. These devices are composed of two chips: the electrode chip and the mirror chip, which are processed separately and assembled consecutively. The mirror chip is bonded on top of the electrode chip and microfabricated pillars on the electrode chip provide the necessary spacing between the two parts. A process flow utilizing refilling techniques based on borophosphosilicate glass (BPSG) deposition and reflow was developed. Programmable reflective slit masks based on this fabrication process were microfabricated and characterized. These devices exhibit a micromirror deformation of 11 nm peak-to-valley and an actuation voltage of 145 V for a tilt angle of 9°. Preparation of samples for MOS experiments are underway.

Citation Download Citation

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, and Nico de Rooij "Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940P (16 February 2010); https://doi.org/10.1117/12.841547

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