Simultaneous two-dimensional nanometric-scale position monitoring by probing a two-dimensional photonic crystal plate

Kuei-Chu Hsu; Chii-Chang Chen; Chia-Hua Chan; Pei-Fang Chung; Yinchieh Lai

doi:10.1117/12.839187

24 February 2010 Simultaneous two-dimensional nanometric-scale position monitoring by probing a two-dimensional photonic crystal plate

Kuei-Chu Hsu, Chii-Chang Chen, Chia-Hua Chan, Pei-Fang Chung, Yinchieh Lai

Author Affiliations +

Proceedings Volume 7609, Photonic and Phononic Crystal Materials and Devices X; 76091J (2010) https://doi.org/10.1117/12.839187
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Simultaneous two-dimensional nanometric-scale position monitoring can be achieved in a simple interferometric setup by real-time probing a hexagonal photonic crystal glass substrate. The minimum detectable translational movement is determined by the period of photonic crystal array, and can be as high as 8 nm in the present work.

Citation Download Citation

Kuei-Chu Hsu, Chii-Chang Chen, Chia-Hua Chan, Pei-Fang Chung, and Yinchieh Lai "Simultaneous two-dimensional nanometric-scale position monitoring by probing a two-dimensional photonic crystal plate", Proc. SPIE 7609, Photonic and Phononic Crystal Materials and Devices X, 76091J (24 February 2010); https://doi.org/10.1117/12.839187

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