Surface roughness measurement by digital holography

Yan Li; Dayong Wang; Jie Zhao; Guangjun Wang; Yunxin Wang

doi:10.1117/12.865743

11 October 2010 Surface roughness measurement by digital holography

Yan Li, Dayong Wang, Jie Zhao, Guangjun Wang, Yunxin Wang

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560X (2010) https://doi.org/10.1117/12.865743
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Surface roughness is crucial guideline to the surface quantity of work piece. This paper demonstrates a simple approach for measurement of surface roughness by using digital holography imaging method based on reflection off-axis lensless Fourier transform (LFT) holography. The surface profiles of the standard roughness sample plates which have the different arithmetic average height values are used as the measurement sample. Comparing the arithmetical average height values of the roughness sample plates obtained from the experiment with the given parameters, the results are in good agreement. It has shown that the method is reasonable and efficient.

Citation Download Citation

Yan Li, Dayong Wang, Jie Zhao, Guangjun Wang, and Yunxin Wang "Surface roughness measurement by digital holography", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560X (11 October 2010); https://doi.org/10.1117/12.865743

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