A new system for measuring the diffraction efficiency of large aperture gratings

Xiaowei Zhou; Xiao Wang; Zhengkun Liu; Xiangdong Xu; Shaojun Fu

doi:10.1117/12.866282

22 October 2010 A new system for measuring the diffraction efficiency of large aperture gratings

Xiaowei Zhou, Xiao Wang, Zhengkun Liu, Xiangdong Xu, Shaojun Fu

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 76571E (2010) https://doi.org/10.1117/12.866282
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A simple and new system for measuring the diffraction efficiency of large aperture gratings at littrow angle is established in this paper. The reference grating Po, double beams and timer with shutter have been draw into the system for eliminating the impact of polarization and stray light, fluctuation of incident light, and the fatigue of photodetector. A program is designed to scan, measure and calculate the diffraction efficiency of the gratings automatically. The diffraction efficiency accuracy measured for the gratings is increased by ~1% with this system. To achieve more measured accuracy, additional beam of reflection light should be imported.

Citation Download Citation

Xiaowei Zhou, Xiao Wang, Zhengkun Liu, Xiangdong Xu, and Shaojun Fu "A new system for measuring the diffraction efficiency of large aperture gratings", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571E (22 October 2010); https://doi.org/10.1117/12.866282

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