Implementing a capacitive pressure sensor realized on LTCC

Cosmin Tămaş; Cristina Marghescu; Ciprian Ionescu; Alexandru Vasile

doi:10.1117/12.882397

3 December 2010 Implementing a capacitive pressure sensor realized on LTCC

Cosmin Tămaş, Cristina Marghescu, Ciprian Ionescu, Alexandru Vasile

Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78210H (2010) https://doi.org/10.1117/12.882397
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania

Abstract

LTCC (Low Temperature Co-Fired Ceramic) has great potential in the field of sensors and transducers due to its thermal, electrical and mechanical properties. The paper describes work concerning a capacitive pressure sensor realized on LTCC with thick-film deposition technologies. A capacitive pressure sensor converts a change in the position of the conductive plates to an electrical signal; for this a deformable diaphragm is used. In the presented case one electrode is bonded to the deformable diaphragm (an edge-clamped, circular diaphragm) and the other electrode is fixed. The signal from the sensor is processed by the AD7745 circuit. This circuit is a high resolution digital capacity-signal converter with high performances, high linearity ±0.01% and very good accuracy ±4 fF. The circuit also encompasses a voltage reference and a temperature sensor with a resolution of 0.1°C. The external connection is made through the I2C interface, using a signal control unit which processes the signal and sends the information to an LCD (liquid crystal display) and/or to a computer which, in turn, records the information for later use through the USB interface.

Citation Download Citation

Cosmin Tămaş, Cristina Marghescu, Ciprian Ionescu, and Alexandru Vasile "Implementing a capacitive pressure sensor realized on LTCC", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78210H (3 December 2010); https://doi.org/10.1117/12.882397

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