Efficient diffractive optical elements from glass with continuous surface profiles

Yu. V. Miklyaev; A. Krasnaberski; M. Ivanenko; A. Mikhailov; W. Imgrunt; L. Aschke; V. N. Lissotschenko

doi:10.1117/12.874642

18 February 2011 Efficient diffractive optical elements from glass with continuous surface profiles

Yu. V. Miklyaev, A. Krasnaberski, M. Ivanenko, A. Mikhailov, W. Imgrunt, L. Aschke, V. N. Lissotschenko

Proceedings Volume 7913, Laser Resonators and Beam Control XIII; 79130B (2011) https://doi.org/10.1117/12.874642
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Diffractive optical elements (DOE) play an important role for laser beam shaping in industry, for example in lithography or parallel laser material processing. Typically such applications require high damage threshold and low background illumination (high contrast and efficiency). Usual DOE with binary phase (step-like) profiles are made microlithographically and suffer from substantial scattering on profile derivative discontinuities. That gives also tendency to lower damage threshold as compared to intrinsic material values. The LIMO approach is based contrarily on a proprietary, non etching material processing and is suitable for manufacturing of high-precision free programmable continuous surface profiles in optical glasses and crystals. We report on linear symmetric diffractive beam splitter 1:11 with high homogeneity and efficiency > 95% and discuss also other DOE designs. The design data, simulations with measured surface profiles and experimental intensity distributions are in very good agreement. Furthermore we report on a new type of optical attenuator composed from two DOE gratings. Its dynamic transmission range is 0.3% to 98%. The required lateral DOE shift is only 5 - 10 μm in the present design, so that the device can be very fast and applicable for dynamic intensity stabilization.

Citation Download Citation

Yu. V. Miklyaev, A. Krasnaberski, M. Ivanenko, A. Mikhailov, W. Imgrunt, L. Aschke, and V. N. Lissotschenko "Efficient diffractive optical elements from glass with continuous surface profiles", Proc. SPIE 7913, Laser Resonators and Beam Control XIII, 79130B (18 February 2011); https://doi.org/10.1117/12.874642

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available