Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film

T. Hiromoto; K. Momoo; Y. Nakata; N. Miyanaga

doi:10.1117/12.874407

21 February 2011 Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film

T. Hiromoto, K. Momoo, Y. Nakata, N. Miyanaga

Author Affiliations +

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 792013 (2011) https://doi.org/10.1117/12.874407
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Interfering ultra-short pulse laser processing can make nano-structures on metallic thin films. The unit nano-structures are nano-waterdrop, nanocrown, nanobump etc.. They change according to the character of target and the interference pattern. An interference pattern of four beams, diffracted by a transmission grating, is like a simple matrix. We generated arranged periodic structures different from the past experiments, by changing the configuration of four interfering beams. Parameters of an interference pattern are wavelength, correlation angle, difference of intensities and phase shift between the beams. As a result, complicated or duplicated structures can be generated.

Citation Download Citation

T. Hiromoto, K. Momoo, Y. Nakata, and N. Miyanaga "Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 792013 (21 February 2011); https://doi.org/10.1117/12.874407

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