Shaping light with MOEMS

W. Noell; S. Weber; J. Masson; J. Extermann; L. Bonacina; A. Bich; R. Bitterli; H. P. Herzig; D. Kiselev; T. Scharf; R. Voelkel; K. J. Weible; J.-P. Wolf; N. F. de Rooij

doi:10.1117/12.873051

14 February 2011 Shaping light with MOEMS

W. Noell, S. Weber, J. Masson, J. Extermann, L. Bonacina, A. Bich, R. Bitterli, H. P. Herzig, D. Kiselev, T. Scharf, R. Voelkel, K. J. Weible, J.-P. Wolf, N. F. de Rooij

Author Affiliations +

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300P (2011) https://doi.org/10.1117/12.873051
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser, while the second device is complex micromirror array with new capabilities for femtosecond laser pulse shaping. Showing the two systems right next to each other demonstrates the vast options and versatility of MOEMS for shaping light in the space and time domain.

Citation Download Citation

W. Noell, S. Weber, J. Masson, J. Extermann, L. Bonacina, A. Bich, R. Bitterli, H. P. Herzig, D. Kiselev, T. Scharf, R. Voelkel, K. J. Weible, J.-P. Wolf, and N. F. de Rooij "Shaping light with MOEMS", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300P (14 February 2011); https://doi.org/10.1117/12.873051

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