Raman Microscopy Of Semiconductor Films

Philippe M Fauchet; Ian H. Campbell

doi:10.1117/12.940908

22 April 1987 Raman Microscopy Of Semiconductor Films

Philippe M Fauchet, Ian H. Campbell

Proceedings Volume 0794, Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices; (1987) https://doi.org/10.1117/12.940908
Event: Advances in Semiconductors and Semiconductor Structures, 1987, Bay Point, FL, United States

Abstract

The Raman spectrum of semiconductors is sensitive to changes in the structural, mechanical and electrical properties. We report results obtained with the Raman microprobe after laser processing or damage of semiconductor thin films. The spatial resolution in our experiments has allowed the observation of unsuspected modifications.

Citation Download Citation

Philippe M Fauchet and Ian H. Campbell "Raman Microscopy Of Semiconductor Films", Proc. SPIE 0794, Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices, (22 April 1987); https://doi.org/10.1117/12.940908

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