Monte Carlo Simulation Of The Growth Of ZnSe By MBE

R. Venkatasubramanian; N. Otsuka; S. Datta; L. A. Kolodziejski; R. L. Gunshor

doi:10.1117/12.941008

20 April 1987 Monte Carlo Simulation Of The Growth Of ZnSe By MBE

R. Venkatasubramanian, N. Otsuka, S. Datta, L. A. Kolodziejski, R. L. Gunshor

Proceedings Volume 0796, Growth of Compound Semiconductors; (1987) https://doi.org/10.1117/12.941008
Event: Advances in Semiconductors and Semiconductor Structures, 1987, Bay Point, FL, United States

Abstract

A Monte Carlo study of the growth of ZnSe by molecular beam epitaxy is presented. The study is focused on the role of surface kinetic reactions in the growth of the epilayers. Two different models for the incorporation of Se molecules, one with a highly reactive physisorbed state and the other with a relatively nonreactive physisorbed state are employed for the simulations. It is shown that the structural quality of the epilayers is very sensitive to the flux ratio if the physisorbed state is relatively nonreactive. It is also shown that if the physisorbed state is highly reactive, good quality epilayers are obtained over a wide range of flux ratio. Based on the present study, it is suggested that the reactivity of the physisobed state can be investigated by comparing the results of the simulations with the reflection high energy electron diffraction observations of the surface of the growing film.

Citation Download Citation

R. Venkatasubramanian, N. Otsuka, S. Datta, L. A. Kolodziejski, and R. L. Gunshor "Monte Carlo Simulation Of The Growth Of ZnSe By MBE", Proc. SPIE 0796, Growth of Compound Semiconductors, (20 April 1987); https://doi.org/10.1117/12.941008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available