Adaptation of roll-to-roll imprint lithography: from flexible electronics to structural templates

Edward R. Holland; Albert Jeans; Ping Mei; Carl P. Taussig; Richard E. Elder; Cynthia Bell; Emmett Howard; John Stowell

doi:10.1117/12.882085

4 April 2011 Adaptation of roll-to-roll imprint lithography: from flexible electronics to structural templates

Edward R. Holland, Albert Jeans, Ping Mei, Carl P. Taussig, Richard E. Elder, Cynthia Bell, Emmett Howard, John Stowell

Proceedings Volume 7970, Alternative Lithographic Technologies III; 797016 (2011) https://doi.org/10.1117/12.882085
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

HP has previously demonstrated the roll-to-roll (R2R) fabrication of active-matrix display backplanes using the Self-Aligned Imprint Lithography (SAIL) process. This approach permits a single imprint step to create a multi level mask comprising all patterns required for subsequent etching steps, obviating the need for multiple alignment steps. In this paper the imprint lithography technique and aspects of SAIL are reviewed. New work using imprint processing to generate structural templates, with aspect ratios approaching 6:1, for fluid containment will be presented. Arrays of transparent well structures, formed on a flexible transparent substrate provide the basis for a color display filter matrix that is filled by inkjet deposition of pigmented resins. A primary benefit of this approach is precise color pattern definition. A separation between primary color fields of 4 microns is realized without risk of color mixing or overlap. Components patterned with high absolute precision by imprint lithography were readily integrated with parts from other sources to yield flexible color reflective display demonstrator panels. This work highlights the flexibility of imprint processing and its suitability for use with a wide variety of materials and in differing applications.

Citation Download Citation

Edward R. Holland, Albert Jeans, Ping Mei, Carl P. Taussig, Richard E. Elder, Cynthia Bell, Emmett Howard, and John Stowell "Adaptation of roll-to-roll imprint lithography: from flexible electronics to structural templates", Proc. SPIE 7970, Alternative Lithographic Technologies III, 797016 (4 April 2011); https://doi.org/10.1117/12.882085

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available