Annealing of sol-gel derived metal-oxide thin films by a UV laser pulse train

Jie Zhang

doi:10.1117/12.905691

15 February 2012 Annealing of sol-gel derived metal-oxide thin films by a UV laser pulse train

Jie Zhang

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82430C (2012) https://doi.org/10.1117/12.905691
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Annealing of high-k metal-oxide (TiO₂, PZT, and BaTiO₃) Sol-Gel derived films by a 266nm laser pulse train was investigated. The TiO₂, PZT and BaTiO₃ Sol-Gel ink was used as precursors. A high repetition rate DPSS laser (up to 300 kHz, 25ns, 266nm, Coherent AVIA series), which produces an ns pulse train with a pulse delay of 3.3-33.3 ìs, was used as the heat source. The dense, hard and uniform metal-oxide thin films are fabricated on glass and Si substrates, respectively by laser annealing. The films on the glass substrate appear to be ploy-crystalline. The films on the Si substrate appear to be amorphous with nano-crystals embedded. These laser annealed films were characterized by AFM, SEM, TEM and Raman spectroscopy, respectively. The laser heating process was also numerically simulated.

Citation Download Citation

Jie Zhang "Annealing of sol-gel derived metal-oxide thin films by a UV laser pulse train", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430C (15 February 2012); https://doi.org/10.1117/12.905691

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