Radio frequency plasma pre-treatment for selective electroless Ag coating of three-dimensional SU-8 microstructures

Andrew A. Bettiol; Yuanjun Yan; Ee Jin Teo; Hendrix Tanoto; Jinghua Teng

doi:10.1117/12.908228

14 February 2012 Radio frequency plasma pre-treatment for selective electroless Ag coating of three-dimensional SU-8 microstructures

Andrew A. Bettiol, Yuanjun Yan, Ee Jin Teo, Hendrix Tanoto, Jinghua Teng

Author Affiliations +

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 824916 (2012) https://doi.org/10.1117/12.908228
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Three dimensional metamaterials are fabricated using direct laser writing in SU-8 polymer followed by an electroless coating process. A method has been developed to allow for selective electroless plating of SU-8 microstructures with a smooth conformal coating of Ag. The process utilizes radio frequency plasma pretreatment to modify the SU-8 surface so that Ag ions can nucleate on the surface, leaving the substrate uncoated. An array of split ring resonators and other 3D microstructures are used to demonstrate how the technique can be applied to metamaterials applications.

Citation Download Citation

Andrew A. Bettiol, Yuanjun Yan, Ee Jin Teo, Hendrix Tanoto, and Jinghua Teng "Radio frequency plasma pre-treatment for selective electroless Ag coating of three-dimensional SU-8 microstructures", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824916 (14 February 2012); https://doi.org/10.1117/12.908228

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