Open Access Paper
17 March 2012 Front Matter: Volume 8252
Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 825201 (2012) https://doi.org/10.1117/12.928140
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8252, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 8252", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 825201 (17 March 2012); https://doi.org/10.1117/12.928140
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KEYWORDS
Photonics

Microsystems

Microopto electromechanical systems

Silver

Imaging systems

Microelectromechanical systems

Mirrors

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