Paper
16 October 2012 Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration
Yaguo Li, Yongbo Wu, Jian Wang, Qiao Xu, Wei Yang, Yinbiao Guo
Author Affiliations +
Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841606 (2012) https://doi.org/10.1117/12.975135
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Ultrasonic vibration assisted machining with harder abrasives than the material to be machined can improve the quality of machined surface and manufacturing efficiency. Therefore, we integrated ultrasonic vibration (UV) into a recently developed technique chemo-mechanical bound-abrasive polishing in anticipation of further increasing the material removal rate (MRR) and/or surface roughness. The preliminary results indicate that ultrasonic vibration assisted chemo-mechanical bound-abrasive polishing can lead to increased material removal rate of manufactured optics while leaving the surface roughness comparable to conventional chemo-mechanical bound-abrasive polishing. The great MRR is attributed to the superiority of UV-assisted chemo-mechanical bound-abrasive polishing in discharging resultant swarf during machining.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yaguo Li, Yongbo Wu, Jian Wang, Qiao Xu, Wei Yang, and Yinbiao Guo "Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841606 (16 October 2012); https://doi.org/10.1117/12.975135
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Cited by 4 scholarly publications.
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KEYWORDS
Ultraviolet radiation

Polishing

Ultrasonics

Silica

Abrasives

Surface roughness

Surface finishing

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