Single-step direct laser fabrication of complex shaped microoptical components

Albertas Žukauskas; Kristupas K. Tikuišis; Mindaugas Ščiuka; Andrius Melninkaitis; Roaldas Gadonas; Carsten Reinhardt; Mangirdas Malinauskas

doi:10.1117/12.921994

8 May 2012 Single-step direct laser fabrication of complex shaped microoptical components

Albertas Žukauskas, Kristupas K. Tikuišis, Mindaugas Ščiuka, Andrius Melninkaitis, Roaldas Gadonas, Carsten Reinhardt, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 8428, Micro-Optics 2012; 84280K (2012) https://doi.org/10.1117/12.921994
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We report on the fabrication of the minimized conventional microoptical components out of the hybrid organic- inorganic SZ2080 and SG4060 photoresins using laser direct writing technique. An ascending laser focus multiscan approach is introduced as a method for the structuring of 2D nanolines. The diameters and heights of the nanolines are comparable to the ones written with the electron beam lithography. Using our proposed laser direct writing approach one can write 3D microstructures with the 2D nanofeatures in a single step procedure. As demonstration of this technology, microlenses with 1D, 2D and circular transmission gratings were fabricated. Additionally, for the rst time, ISO certied laser-induced damage testing was applied to determine the optical breakdown threshold of the SZ2080 photoresin used for the laser direct writing.

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Albertas Žukauskas, Kristupas K. Tikuišis, Mindaugas Ščiuka, Andrius Melninkaitis, Roaldas Gadonas, Carsten Reinhardt, and Mangirdas Malinauskas "Single-step direct laser fabrication of complex shaped microoptical components", Proc. SPIE 8428, Micro-Optics 2012, 84280K (8 May 2012); https://doi.org/10.1117/12.921994

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