Physical and mechanical properties of a TIR-based liquid micro deformable mirror

Eric S. ten Have; Gleb Vdovin

doi:10.1117/12.927073

8 May 2012 Physical and mechanical properties of a TIR-based liquid micro deformable mirror

Eric S. ten Have, Gleb Vdovin

Proceedings Volume 8428, Micro-Optics 2012; 84281W (2012) https://doi.org/10.1117/12.927073
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

A deformable mirror based on the principle of total internal reflection (TIR) of light from an electrostatically deformed liquid-air interface was realized and used to perform closed-loop adaptive optical correction on a collimated laser beam aberrated by a rotating phase disk. The liquid system was characterized including open- and closed-loop frequency responses, determination of rise-times, the damping times of the liquid, and the influence of liquid surface motion in the absence of external optical aberrations. The dynamic behavior of the liquid was found to be dominated by gravity waves and the results of the experimental realization were in good agreement with the predictions of the theory. A miniaturization of the system promises to eliminate the dominant gravity waves and considerably reduce the errors introduced by ambient vibrations. Here we explore the possibilities of such a micro mirror and establish the boundary conditions and requirements for its realization.

Citation Download Citation

Eric S. ten Have and Gleb Vdovin "Physical and mechanical properties of a TIR-based liquid micro deformable mirror", Proc. SPIE 8428, Micro-Optics 2012, 84281W (8 May 2012); https://doi.org/10.1117/12.927073

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available