Optical device for precision Moiré topography of micro surfaces

S. Meguellati; S. Djabi

doi:10.1117/12.980888

18 December 2012 Optical device for precision Moiré topography of micro surfaces

S. Meguellati, S. Djabi

Proceedings Volume 8550, Optical Systems Design 2012; 85501M (2012) https://doi.org/10.1117/12.980888
Event: SPIE Optical Systems Design, 2012, Barcelona, Spain

Abstract

This method of optical scanning presented in this paper is used for precision measurement deformation or absolute forms in comparison with a reference component form, of optical or mechanical components, on surfaces that are of the order of mm² and more. The principle of the method is to project the image of the source grating on the surface to be inspected, after reflection; the image of the source grating is printed by the object topography and is then projected onto the plane of the reference grating to detect defects. The optical device used allows the magnification dimensional surface up to 1000 times the surface inspected, which allows easy processing and reaches an exceptional nanometric imprecision of measurements. According to the measurement principle, the sensitivity for displacement measurement using moiré technique depends on the frequency grating, for increase the detection resolution. This measurement technique can be used advantageously to measure the deformations generated by constraints on functional parts and the influence of these variations on the function. It can also be used for dimensional control when, for example, to quantify the error as to whether a piece is good or rubbish. It then suffices to compare a figure of moiré fringes with another previously recorded from a piece considered standard, which saves time, money and accuracy. This method of control and measurement allows real time control; speed control and the detection resolution may vary depending on the importance of defects to be measured.

Citation Download Citation

S. Meguellati and S. Djabi "Optical device for precision Moiré topography of micro surfaces", Proc. SPIE 8550, Optical Systems Design 2012, 85501M (18 December 2012); https://doi.org/10.1117/12.980888

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