III-V access waveguides using atomic layer deposition

Khaled Mnaymneh; Simon Frédérick; Dan Dalacu; Jean Lapointe; Philip J. Poole; Robin L. Williams

doi:10.1117/12.2004310

5 March 2013 III-V access waveguides using atomic layer deposition

Khaled Mnaymneh, Simon Frédérick, Dan Dalacu, Jean Lapointe, Philip J. Poole, Robin L. Williams

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86130D (2013) https://doi.org/10.1117/12.2004310
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Normally, the larger refractive index contrast of silicon-on-insulator (SOI) photonics used for transporting highly confined optical modes is not available in compound semiconductor systems because the optically active layer rests upon an epitaxial support layer having a similar refractive index. Here, a semiconductor-under-insulator (SUI) technology for compound semiconductor membrane photonic circuitry is presented. It will be shown that such a technology can facilitate the transport of highly confined optical modes in compound semiconductor systems and is anticipated to be a critical part of future scalable quantum photonics applications.

Citation Download Citation

Khaled Mnaymneh, Simon Frédérick, Dan Dalacu, Jean Lapointe, Philip J. Poole, and Robin L. Williams "III-V access waveguides using atomic layer deposition", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130D (5 March 2013); https://doi.org/10.1117/12.2004310

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available