Holographic diffraction gratings to measure micromovements

Arturo Olivares-Pérez; Mayra Alejandra Lara-Peña; Janeth Alexandra García-Monge; Pavel Alejandro Valencia-Acuña; Joan Manuel Villa-Hernández; Israel Fuentes-Tapia

doi:10.1117/12.2005439

1 March 2013 Holographic diffraction gratings to measure micromovements

Arturo Olivares-Pérez, Mayra Alejandra Lara-Peña, Janeth Alexandra García-Monge, Pavel Alejandro Valencia-Acuña, Joan Manuel Villa-Hernández, Israel Fuentes-Tapia

Author Affiliations +

Proceedings Volume 8644, Practical Holography XXVII: Materials and Applications; 864415 (2013) https://doi.org/10.1117/12.2005439
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Holographic diffraction gratings can measure micro movements, with a system that detects each period of the moving grating. One of the important features of this device is the grating period, which determines the measurement accuracy. The period can be on the order of fractions of micron, with high reproducibility and with an error of a quarter of period. One of the qualities of this system is its robustness; the measures are invariant to noise induced by device movements and environment thermal changes.

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Arturo Olivares-Pérez, Mayra Alejandra Lara-Peña, Janeth Alexandra García-Monge, Pavel Alejandro Valencia-Acuña, Joan Manuel Villa-Hernández, and Israel Fuentes-Tapia "Holographic diffraction gratings to measure micromovements", Proc. SPIE 8644, Practical Holography XXVII: Materials and Applications, 864415 (1 March 2013); https://doi.org/10.1117/12.2005439

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