Extension of patterning technologies down to sub-10nm half pitch

Shoji Mimotogi

doi:10.1117/12.2015187

29 March 2013 Extension of patterning technologies down to sub-10nm half pitch

Shoji Mimotogi

Proceedings Volume 8685, Advanced Etch Technology for Nanopatterning II; 868503 (2013) https://doi.org/10.1117/12.2015187
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Patterning methods for sub-10nm half pitch are discussed. Four patterning methods are selected due to discussing their feasibility: immersion lithography with self-aligned octuplet patterning (Imm-SAOP), EUVL with self-aligned double patterning (EUV-SADP), EUVL with litho-etch-litho-etch (EUV-LELE) and EUVL with directed self-assembly (EUV-DSA). There are two significant issues in lithography process and etch process: iso-dense bias and CD variation. Relaxation of design rule except for memory cell makes iso-dense bias issue not critical. However, CD variation influences directly device characterization. CD variation formula are established for the four patterning method described above. Assuming the challenging spec for each unit process, CD variation is estimated for the four patterning methods using the formula. Although EUV-SADP and EUV-DSA are candidates for sub-10nm patterning technology, Imm-SAOP and EUV-LELE are out of spec required from device characteristics.

Citation Download Citation

Shoji Mimotogi "Extension of patterning technologies down to sub-10nm half pitch", Proc. SPIE 8685, Advanced Etch Technology for Nanopatterning II, 868503 (29 March 2013); https://doi.org/10.1117/12.2015187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available