Making, testing, applying: some progress in the field of micro-optics at ITO

W. Osten; G. Baer; M. Häfner; W. Lyda; C. Pruss; R. Reichle; F. Schaal

doi:10.1117/12.2020249

22 June 2013 Making, testing, applying: some progress in the field of micro-optics at ITO

W. Osten, G. Baer, M. Häfner, W. Lyda, C. Pruss, R. Reichle, F. Schaal

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876905 (2013) https://doi.org/10.1117/12.2020249
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

Microoptical components play an increasing role in different technology fields such as medical engineering, materials and information processing, imaging and metrology. But their realization needs the combination of modern design concepts with sophisticated processing technologies, new materials and design tools. Furthermore, the introduction of ambitious processing technologies must be accompanied by effective metrology and inspection tools. Therefore, this paper reports about the technologies for making microoptics at ITO. Because sophisticated measurement tools are an indispensable part of the fabrication process, the paper describes our multi-scale inspection approach for the testing of microstructures on wafer-scale level. Finally, some representative applications of microoptical components for advanced measurement and imaging are explained.

Citation Download Citation

W. Osten, G. Baer, M. Häfner, W. Lyda, C. Pruss, R. Reichle, and F. Schaal "Making, testing, applying: some progress in the field of micro-optics at ITO", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876905 (22 June 2013); https://doi.org/10.1117/12.2020249

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