CCD evaluation for estimating measurement precision in lateral shearing interferometry

Bingcai Liu; Bing Li; Ailing Tian; Baopeng Li

doi:10.1117/12.2019073

22 June 2013 CCD evaluation for estimating measurement precision in lateral shearing interferometry

Bingcai Liu, Bing Li, Ailing Tian, Baopeng Li

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691R (2013) https://doi.org/10.1117/12.2019073
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

Because of larger measurement ability of wave-front deviation and no need of reference plat, the lateral shearing interferometry based on four step phase shifting has been widely used for wave-front measurement. After installation shearing interferograms are captured by CCD camera, and the actual phase data of wave-front can be calculated by four step phase shift algorithm and phase unwrapping. In this processing, the pixel resolution and gray scale of CCD camera is the vital factor for the measurement precision. In this paper, Based on the structure of lateral shearing surface interferometer with phase shifting, pixel resolution more or less for measurement precision is discussed. Also, the gray scale is 8 bit, 12 bit or 16 bit for measurement precision is illustrated by simulation.

Citation Download Citation

Bingcai Liu, Bing Li, Ailing Tian, and Baopeng Li "CCD evaluation for estimating measurement precision in lateral shearing interferometry", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691R (22 June 2013); https://doi.org/10.1117/12.2019073

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