High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup

Holger Knell; Peter Lehmann

doi:10.1117/12.2020121

13 May 2013 High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup

Holger Knell, Peter Lehmann

Author Affiliations +

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87880R (2013) https://doi.org/10.1117/12.2020121
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

For sub-micrometer measurements of large objects a setup is presented utilizing a line-scan camera for data acquisition with a Michelson interferometer. To extract height information a carrier fringe approach is used in combination with a linear axis moving the specimen. This technique provides the capability of quick measurements for large areas. For the estimation of the maximum acceptable scan speed the deviation of the linear axis from ideal movement is determined. Also a suitable choice for a light source is presented. Measurement capabilities are approved by reference measurements on a sinusoidal standard.

Citation Download Citation

Holger Knell and Peter Lehmann "High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880R (13 May 2013); https://doi.org/10.1117/12.2020121

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