Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Y. van de Burgt; Y. Bellouard

doi:10.1117/12.2044774

7 March 2014 Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Y. van de Burgt, Y. Bellouard

Proceedings Volume 8969, Synthesis and Photonics of Nanoscale Materials XI; 896903 (2014) https://doi.org/10.1117/12.2044774
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

Citation Download Citation

Y. van de Burgt and Y. Bellouard "Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels", Proc. SPIE 8969, Synthesis and Photonics of Nanoscale Materials XI, 896903 (7 March 2014); https://doi.org/10.1117/12.2044774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available