Resonator structures on AlN ceramics surface treated by laser radiation

Pawel E. Koziol; Arkadiusz J. Antonczak; Bogusz Stepak; Przemyslaw A. Gorski; Michal Walczakowski; Norbert Palka; Krzysztof M. Abramski

doi:10.1117/12.2037937

7 March 2014 Resonator structures on AlN ceramics surface treated by laser radiation

Pawel E. Koziol, Arkadiusz J. Antonczak, Bogusz Stepak, Przemyslaw A. Gorski, Michal Walczakowski, Norbert Palka, Krzysztof M. Abramski

Author Affiliations +

Proceedings Volume 8973, Micromachining and Microfabrication Process Technology XIX; 89730Q (2014) https://doi.org/10.1117/12.2037937
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

In this paper a method for producing resonant structures using laser micromachining is presented. In the spot of laser beam impact on AlN ceramics surface a conductive aluminum layer is formed. Compilation of process parameters allows for the fabrication of structures with resistance at Rs ~ 0.01Ω/Rs. It has been also found out that the maximum value of resistance for which spiral resonator structures manifest their unique properties is at the level of Rs = 1.43 Ω. Furthermore, the occurrence of mutual capacity which value is dependent on the arrangement of individual SR structures with respect to each other was observed and examined. Based on satisfactory results for SR structures, it has been attempted to produce a resonant structures dedicated to the THz range based on the process of direct metallization of AlN ceramics surface. As a result, the Split Ring Resonator structure whose properties were verified by using the THz -TDS method was manufactured. In case of the field E perpendicular to SRR structure and one resonance area for 0.50 THz with field E parallel to the structure, two characteristic resonant dips for 0.22 THz and 0.46 THz were obtained. The studies confirmed that the method of direct metallization of AlN ceramics allows to produce resonant structures in the THz range.

Citation Download Citation

Pawel E. Koziol, Arkadiusz J. Antonczak, Bogusz Stepak, Przemyslaw A. Gorski, Michal Walczakowski, Norbert Palka, and Krzysztof M. Abramski "Resonator structures on AlN ceramics surface treated by laser radiation", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730Q (7 March 2014); https://doi.org/10.1117/12.2037937

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