Merged photonic crystal slot waveguide: confining slow modes in tiny volumes

M. Roussey; A. Bera; P. Stenberg; S. Honkanen; M. Kuittinen

doi:10.1117/12.2036258

19 February 2014 Merged photonic crystal slot waveguide: confining slow modes in tiny volumes

M. Roussey, A. Bera, P. Stenberg, S. Honkanen, M. Kuittinen

Proceedings Volume 8994, Photonic and Phononic Properties of Engineered Nanostructures IV; 89940C (2014) https://doi.org/10.1117/12.2036258
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

In this proceeding we are describing the optimization of a silicon slot waveguide coated with titanium dioxide deposited by Atomic Layer Deposition. In addition we show the characterization of a photonic crystal cavity directly patterned on a slot waveguide.

Citation Download Citation

M. Roussey, A. Bera, P. Stenberg, S. Honkanen, and M. Kuittinen "Merged photonic crystal slot waveguide: confining slow modes in tiny volumes", Proc. SPIE 8994, Photonic and Phononic Properties of Engineered Nanostructures IV, 89940C (19 February 2014); https://doi.org/10.1117/12.2036258

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