Investigation of electron beam irradiation effect on pore formation for single molecule bio-sensor fabrication

Seong Soo Choi; Myoung Jin Park; Chul Hee Han; Sung In Kim; Jung Ho Yoo; Kyung Jin Park; Nam Kyou Park; Yong Sang Kim

doi:10.1117/12.2075906

11 March 2015 Investigation of electron beam irradiation effect on pore formation for single molecule bio-sensor fabrication

Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sung In Kim, Jung Ho Yoo, Kyung Jin Park, Nam Kyou Park, Yong Sang Kim

Author Affiliations +

Proceedings Volume 9340, Plasmonics in Biology and Medicine XII; 93400R (2015) https://doi.org/10.1117/12.2075906
Event: SPIE BiOS, 2015, San Francisco, California, United States

Abstract

There have been tremendous interests about the fabrication of the Au plasmonic nanopore due to its capability of the nanosize optical biosensor. We have investigated the influence of low energy electron beam irradiation on an Au nanomembrane during Au nanopore formation. In this report, the influence of electron beam irradiation on the Au nanopore formation will be reported. The nanopores on the 200 nm thick Au membrane were initially fabricated using focused ion beam (FIB) and high energy electron beam techniques such as transmission electron microscopy (TEM), and field emission scanning electron microscopy (FESEM). During high energy electron beam by using TEM, either a “shrinking” or a “opening” phenomenon is reported dependent on the ratio of thickness to aperture diameter. However, for a FESEM electron beam irradiation, a shrinking phenomenon is always observed. In this report, the nanopore formation during FESEM electron beam irradiation will be reported depending upon energy absorption and thermal diffusivity.

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Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sung In Kim, Jung Ho Yoo, Kyung Jin Park, Nam Kyou Park, and Yong Sang Kim "Investigation of electron beam irradiation effect on pore formation for single molecule bio-sensor fabrication", Proc. SPIE 9340, Plasmonics in Biology and Medicine XII, 93400R (11 March 2015); https://doi.org/10.1117/12.2075906

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KEYWORDS

Electron beams

Gold

Transmission electron microscopy

Absorption

Biosensors

Scanning electron microscopy

Silica

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