High-sensitive lossy mode resonance-based optical fiber refractometers by means of sputtered indium oxide thin-films

P. Sanchez; K. Gonzalez; C. R. Zamarreño; M. Hernaez; I. R. Matias; F. J. Arregui

doi:10.1117/12.2179751

21 May 2015 High-sensitive lossy mode resonance-based optical fiber refractometers by means of sputtered indium oxide thin-films

P. Sanchez, K. Gonzalez, C. R. Zamarreño, M. Hernaez, I. R. Matias, F. J. Arregui

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95171V (2015) https://doi.org/10.1117/12.2179751
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

Three different optical fiber refractometers based on lossy mode resonances (LMRs) have been fabricated by means of the deposition of indium oxide thin-films. The sensitivity of the devices as well as the full-width at half maximum (FWHM) has been characterized as a function of the surrounding medium refractive index (from 1.332 to 1.471. Obtained results revealed that thinner coating possess higher sensitivities. However, the FWHM is better for thicker coatings. As a general rule, the thicker the In₂O₃ coating the lower the sensitivity, but the better the FWHM. Thus, a compromise is required depending on the necessities of the application.

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P. Sanchez, K. Gonzalez, C. R. Zamarreño, M. Hernaez, I. R. Matias, and F. J. Arregui "High-sensitive lossy mode resonance-based optical fiber refractometers by means of sputtered indium oxide thin-films", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171V (21 May 2015); https://doi.org/10.1117/12.2179751

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