Application Of Heterodyne Nrofilometry And Digital Image Processings To The Stufiilly Of Erosion Phenomena

C. Pieralli; G. Tribillon

doi:10.1117/12.947628

16 January 1989 Application Of Heterodyne Nrofilometry And Digital Image Processings To The Stufiilly Of Erosion Phenomena

C. Pieralli, G. Tribillon

Author Affiliations +

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947628
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An optical heterodyne profilometer has been developped to get parameters of profiles such as roughness, skewness... Now, it is associated with image processings for automated pattern recognition. Their applications, either on calculated profiles or interference patterns, lead to features of defects on a surface. This device can be a useful tool for the study of erosion phenomena.

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C. Pieralli and G. Tribillon "Application Of Heterodyne Nrofilometry And Digital Image Processings To The Stufiilly Of Erosion Phenomena", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947628

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