Development of a polarimetric experimental setup for surface profiling based on a microscopy application

A. Serrano-Trujillo; A. Nava-Vega; V. Ruiz-Cortes

doi:10.1117/12.2188790

9 September 2015 Development of a polarimetric experimental setup for surface profiling based on a microscopy application

A. Serrano-Trujillo, A. Nava-Vega, V. Ruiz-Cortes

Author Affiliations +

Proceedings Volume 9598, Optics and Photonics for Information Processing IX; 95981H (2015) https://doi.org/10.1117/12.2188790
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

We present the methodology for the surface measurement of small testing objects with maximum depth variation of 3mm, using a polarimetric approach. The experimental setup is based on the function of a Differential Interference Contrast microscope, which works as a shearing interferometer. As it is expected, when it comes to an application for non-microscopic samples, certain modifications should be considered on the development of the measurement system. This work focuses on such details that lead to the profiling of a testing object of known dimensions. An algorithm that computes height distribution based on the polarimetric data is implemented and the resulting surface profile is analyzed. Finally, our conclusions about the requirements for an improvement of the presented measurement setup are listed.

Citation Download Citation

A. Serrano-Trujillo, A. Nava-Vega, and V. Ruiz-Cortes "Development of a polarimetric experimental setup for surface profiling based on a microscopy application", Proc. SPIE 9598, Optics and Photonics for Information Processing IX, 95981H (9 September 2015); https://doi.org/10.1117/12.2188790

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