Ultrashort-pulse laser processing of transparent materials: insight from numerical and semi-analytical models

Nadezhda M. Bulgakova; Vladimir P. Zhukov; Inam Mirza; Yuri P. Meshcheryakov; Jan Tomáštík; Václav Michálek; Ondřej Haderka; Ladislav Fekete; Alexander M. Rubenchik; Mikhail P. Fedoruk; Tomáš Mocek

doi:10.1117/12.2217585

14 March 2016 Ultrashort-pulse laser processing of transparent materials: insight from numerical and semi-analytical models

Nadezhda M. Bulgakova, Vladimir P. Zhukov, Inam Mirza, Yuri P. Meshcheryakov, Jan Tomáštík, Václav Michálek, Ondřej Haderka, Ladislav Fekete, Alexander M. Rubenchik, Mikhail P. Fedoruk, Tomáš Mocek

Author Affiliations +

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97350N (2016) https://doi.org/10.1117/12.2217585
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Interaction of ultrashort laser pulses with transparent materials is a powerful technique of modification of material properties for various technological applications. The physics behind laser-induced modification phenomenon is rich and still far from complete understanding. We present an overview of our models developed to describe processes induced by ultrashort laser pulses inside and on the surface of bulk glass. The most sophisticated model consists of two parts. The first part solves Maxwell’s equations supplemented by the rate and hydrodynamics equations for free electrons. The model resolves spatiotemporal dynamics of free-electron population and yields the absorbed energy map. The latter serves as an initial condition for thermoelastoplastic simulations of material redistribution. The simulations performed for a wide range of irradiation conditions have allowed to clarify timescales at which modification occurs after single laser pulses. Simulations of spectrum of laser light scattered by laser-generated plasma revealed considerable blueshifting which increases with pulse energy. To gain insight into temperature evolution of a glass material under the surface irradiation conditions, we employ a model based on the rate equation describing free electron generation coupled with the energy equations for electrons and lattice. Swift heating of electron and lattice subsystems to extremely high temperatures at fs timescale has been found at laser fluences exceeding the threshold fluence by 2-3 times that can result in efficient bremsstrahlung emission from the irradiation spot. The mechanisms of glass ablation with ultrashort laser pulses are discussed by comparing with the experimental data. Finally, a model is outlined, developed for multi-pulse irradiation regimes, which enables gaining insight into the roles of defects and heat accumulation.

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Nadezhda M. Bulgakova, Vladimir P. Zhukov, Inam Mirza, Yuri P. Meshcheryakov, Jan Tomáštík, Václav Michálek, Ondřej Haderka, Ladislav Fekete, Alexander M. Rubenchik, Mikhail P. Fedoruk, and Tomáš Mocek "Ultrashort-pulse laser processing of transparent materials: insight from numerical and semi-analytical models", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350N (14 March 2016); https://doi.org/10.1117/12.2217585

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