Vibration suppression in MEMS devices using electrostatic forces

Hamed Haddad Khodaparast; Hadi Madinei; Michael I. Friswell; Sondipon Adhikari

doi:10.1117/12.2222069

15 April 2016 Vibration suppression in MEMS devices using electrostatic forces

Hamed Haddad Khodaparast, Hadi Madinei, Michael I. Friswell, Sondipon Adhikari

Author Affiliations +

Proceedings Volume 9799, Active and Passive Smart Structures and Integrated Systems 2016; 979917 (2016) https://doi.org/10.1117/12.2222069
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2016, Las Vegas, Nevada, United States

Abstract

This paper investigates the use of electrostatic forces for vibration control of MEMS devices. A micro beam subject to electrostatic loading is considered. The electrostatic forces cause softening nonlinearity and their amplitudes are proportional to the square of applied DC voltages. An optimization problem is set up to minimize the vibration level of the micro-beam at given excitation frequencies. A new method based on incrementing nonlinear control parameters of the system and Harmonic Balance is used to obtain the required DC voltages that suppress unwanted vibration of the micro-beam. The results are illustrated using numerical simulations

Citation Download Citation

Hamed Haddad Khodaparast, Hadi Madinei, Michael I. Friswell, and Sondipon Adhikari "Vibration suppression in MEMS devices using electrostatic forces", Proc. SPIE 9799, Active and Passive Smart Structures and Integrated Systems 2016, 979917 (15 April 2016); https://doi.org/10.1117/12.2222069

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