Advances In Excimer Laser Materials Processing

G. Darcy Poulin; Peter A. Eisele

doi:10.1117/12.960214

16 December 1988 Advances In Excimer Laser Materials Processing

G. Darcy Poulin, Peter A. Eisele

Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960214
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal mechanism such as those associated with YAG or C0₂ processing. This paper reviews briefly the basic mechanisms associated with excimer laser ablation and presents several examples of practical applications of this new technique.

Citation Download Citation

G. Darcy Poulin and Peter A. Eisele "Advances In Excimer Laser Materials Processing", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); https://doi.org/10.1117/12.960214

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