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1 April 2022 Influence of oxidation in the formation and performance of laser-induced periodic surface structures
Camilo Florian Baron, Sabrina V. Kirner, Jean-Luc Déziel, Robert Wonneberger, Andreas Undisz, Karsten Wasmuth, Dirk Spaltmann, Jan Siegel, Jörg Krüger, Jörn Bonse
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Proceedings Volume PC11989, Laser-based Micro- and Nanoprocessing XVI; PC1198905 (2022) https://doi.org/10.1117/12.2608220
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
One important parameter that is often not considered in the formation of laser-induced periodic surface structures (LIPSS) is the laser-induced oxidation produced when oxidation prone materials are irradiated in air environment. In this work, we characterize the response of the oxidation prone hard-coating material chromium nitride and explain the findings with finite-difference time-domain calculations. We also employ complementary surface and in-depth analytic techniques to reveal morphological, chemical and structural features of different types of surface structures and LIPSS produced on titanium-based substrates.
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Camilo Florian Baron, Sabrina V. Kirner, Jean-Luc Déziel, Robert Wonneberger, Andreas Undisz, Karsten Wasmuth, Dirk Spaltmann, Jan Siegel, Jörg Krüger, and Jörn Bonse "Influence of oxidation in the formation and performance of laser-induced periodic surface structures", Proc. SPIE PC11989, Laser-based Micro- and Nanoprocessing XVI, PC1198905 (1 April 2022); https://doi.org/10.1117/12.2608220
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KEYWORDS
Oxidation
Finite-difference time-domain method
Medicine
Oxides
Resistance
Semiconductor lasers
Semiconductor materials
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