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7 March 2022 A method based on complementary transmission and reflection measurements for extracting the optical properties of a thin film
Brett N. Carnio, Anis Attiaoui, Simone Assali, Oussama Moutanabbir, Abdul Elezzabi
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Proceedings Volume PC12000, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XV; PC120000E (2022) https://doi.org/10.1117/12.2607676
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
This conference presentation, “A method based on complementary transmission and reflection measurements for extracting the optical properties of a thin film” was presented at the Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XV conference at SPIE Photonics West 2022.
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Brett N. Carnio, Anis Attiaoui, Simone Assali, Oussama Moutanabbir, and Abdul Elezzabi "A method based on complementary transmission and reflection measurements for extracting the optical properties of a thin film", Proc. SPIE PC12000, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XV, PC120000E (7 March 2022); https://doi.org/10.1117/12.2607676
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KEYWORDS
Thin films
Reflection
Optical properties
Refractive index
Absorption
Semiconducting wafers
Silicon
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