Fabrication method for micro-LEDs on a hetero substrate with ultra-low defect density utilized advanced epitaxial lateral overgrowth technique

Takeshi Kamikawa; Toshihiro Kobayashi; Yuuta Aoki; Noboru Suda; Hiroyuki Ogura; Mitsunari Seida; Kazuma Takeuchi; Kosuke Mishima; Yuuki Taniguchi; Fumio Yamashita; Yuuichiro Hayashi; Katsuaki Masaki

doi:10.1117/12.2668437

21 March 2023 Fabrication method for micro-LEDs on a hetero substrate with ultra-low defect density utilized advanced epitaxial lateral overgrowth technique

Takeshi Kamikawa, Toshihiro Kobayashi, Yuuta Aoki, Noboru Suda, Hiroyuki Ogura, Mitsunari Seida, Kazuma Takeuchi, Kosuke Mishima, Yuuki Taniguchi, Fumio Yamashita, Yuuichiro Hayashi, Katsuaki Masaki

Author Affiliations +

Proceedings Volume PC12421, Gallium Nitride Materials and Devices XVIII; (2023) https://doi.org/10.1117/12.2668437
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

This conference presentation was prepared for Photonics West, 2023.

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Takeshi Kamikawa, Toshihiro Kobayashi, Yuuta Aoki, Noboru Suda, Hiroyuki Ogura, Mitsunari Seida, Kazuma Takeuchi, Kosuke Mishima, Yuuki Taniguchi, Fumio Yamashita, Yuuichiro Hayashi, and Katsuaki Masaki "Fabrication method for micro-LEDs on a hetero substrate with ultra-low defect density utilized advanced epitaxial lateral overgrowth technique", Proc. SPIE PC12421, Gallium Nitride Materials and Devices XVIII, (21 March 2023); https://doi.org/10.1117/12.2668437

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