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White light interferometry (WLI) is the 3D imaging sensor based on interferometry to obtain depth information by acquiring constructive interference. It allows a deep scanning range in high resolution while there are still limitations that lead to a low imaging speed and vibration from the mechanical movement. In this study, we resolved the vibration problem by isolating the depth scanning part in the tunable-path-difference source (TPDS) with a fiber stretcher from the interferometric measurement part. We also applied line-field interferometry to improve scanning speed and to image not only flat surfaces but also curved objects in variable fields of view.
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Sunwoo Woo, Jaeheung Kim, Chang-Seok Kim, "Line-field white light interferometer with tunable-path-difference source controlled by fiber stretcher," Proc. SPIE PC12428, Photonic Instrumentation Engineering X, PC1242801 (9 March 2023); https://doi.org/10.1117/12.2651017