Two-dimensional hexagonal VCSEL arrays with up to 37 VCSELs per array and emitting at 940 nm to 1020 nm are produced on GaAs substrates. Arrays with variable oxide aperture diameters and new processing geometries, with a focus on optimizing the tradeoffs in optical output power, bandwidth, power conversion efficiency, and emitted far field pattern for applications in optical wireless communications are characterized and compared. Standard on wafer probing and packaged array tests are performed including terrestrial free space measurements demonstrating the viability of the core VCSEL array technology for fifth, sixth, and next generation optical wireless systems.
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