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17 March 2023 Quick fabrication VCSEL characterisation for rapid assessment of epitaxy design and growth
Craig P. Allford, Jack Baker, Sara-Jayne Gillgrass, James Meiklejohn, Denise Powell, Wyn Meredith, Tracy Sweet, Iwan Davies, Samuel Shutts, Peter M. Smowton
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Proceedings Volume PC12439, Vertical-Cavity Surface-Emitting Lasers XXVII; PC124390C (2023) https://doi.org/10.1117/12.2648742
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We report on a study using VCSEL Quick Fabrication (VQF) devices for the rapid assessment of epitaxial structures designed for emission at 894nm grown on 100mm substrates. A comparison of measured VQF device results to the epitaxial design specification allows for the extraction of key variances across the wafer and the identification of their potential causes. We also demonstrate the applicability of this technique for the assessment of uniformity and reproducibility of 150mm VCSEL wafers for emission at 940nm, identifying the potential sources for observed variations in device performance that impact in specification device yield.
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Craig P. Allford, Jack Baker, Sara-Jayne Gillgrass, James Meiklejohn, Denise Powell, Wyn Meredith, Tracy Sweet, Iwan Davies, Samuel Shutts, and Peter M. Smowton "Quick fabrication VCSEL characterisation for rapid assessment of epitaxy design and growth", Proc. SPIE PC12439, Vertical-Cavity Surface-Emitting Lasers XXVII, PC124390C (17 March 2023); https://doi.org/10.1117/12.2648742
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KEYWORDS
Vertical cavity surface emitting lasers
Epitaxy
Semiconducting wafers
Integrating spheres
Oxidation
Spectrographs
Structural design
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