New materials and fabrication platforms for metasurfaces

Uriel Levy; Oren Goldberg; Noa Mazurski; Jacob Engelberg

doi:10.1117/12.2680305

5 October 2023 New materials and fabrication platforms for metasurfaces

Uriel Levy, Oren Goldberg, Noa Mazurski, Jacob Engelberg

Proceedings Volume PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI; PC126480T (2023) https://doi.org/10.1117/12.2680305
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

We present our recent progress in developing material platforms for dielectric and metallic metasurfaces. We also discuss some novel methods for fabrication of metasurfaces and demonstrate selected applications.

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Uriel Levy, Oren Goldberg, Noa Mazurski, and Jacob Engelberg "New materials and fabrication platforms for metasurfaces", Proc. SPIE PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI, PC126480T (5 October 2023); https://doi.org/10.1117/12.2680305

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KEYWORDS

Materials processing

Dielectrics

Fabrication

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