Exploring spatial phase resolution limit in epi-mode quantitative phase imaging

Nansen Zhou; Renjie Zhou

doi:10.1117/12.3008497

13 March 2024 Exploring spatial phase resolution limit in epi-mode quantitative phase imaging

Nansen Zhou, Renjie Zhou

Author Affiliations +

Proceedings Volume PC12852, Quantitative Phase Imaging X; PC128521Q (2024) https://doi.org/10.1117/12.3008497
Event: SPIE BiOS, 2024, San Francisco, California, United States

Conference Poster

Abstract

The silicon platform has been widely applied in optoelectronics and sensing to attain versatile functions. Epi-mode quantitative phase imaging (QPI) is promising for non-destructive and high-throughput material metrology. However, spatial resolution and its influencing factors have not been fully explored in epi-mode QPI. Here, we propose to explore the spatial phase resolution limit by studying the influencing factors, including object shape, object size, and phase noise. These factors are related to the signal-to-noise ratio (SNR). The phase object distribution is solved from the transfer-matrix model combined with the consideration of the limited aperture of the imaging system. The study may inspire researchers to further enhance the resolvability of QPI by improving image SNR.

Citation Download Citation

Nansen Zhou and Renjie Zhou "Exploring spatial phase resolution limit in epi-mode quantitative phase imaging", Proc. SPIE PC12852, Quantitative Phase Imaging X, PC128521Q (13 March 2024); https://doi.org/10.1117/12.3008497

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE