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18 June 2024 Reference-free combined X-ray reflectivity and grazing Incidence X-ray fluorescence analysis: metrological and technical aspects
Yves Ménesguen, Marie-Christine Lépy
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Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200D (2024) https://doi.org/10.1117/12.3025160
Event: SPIE Optical Systems Design, 2024, Strasbourg, France
Abstract
The precise characterization of thin layers in microelectronics or related fields is more and more challenging as the targeted thicknesses are decreasing into the nanometer range. Combined XRR-GIXRF analysis is a powerful technique that combines the advantages of the elemental sensitivity of X-ray fluorescence with the thickness and density sensitivity of X-ray reflectivity. This method is performed in a reference-free mode which relies on the precise knowledge of some physical quantities.
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Yves Ménesguen and Marie-Christine Lépy "Reference-free combined X-ray reflectivity and grazing Incidence X-ray fluorescence analysis: metrological and technical aspects", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200D (18 June 2024); https://doi.org/10.1117/12.3025160
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KEYWORDS
X-ray fluorescence spectroscopy
X-rays
Grazing incidence
Metrology
Reflectivity
Photodiodes
Radiometric calibration
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