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18 June 2024 Development of dielectric mirrors by magnetron sputtering for high power laser facilities.
Océane Aubard, Marine Chorel, Eric G. Lavastre, Bruno Bousquet, Corinne Marcel
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Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200I (2024) https://doi.org/10.1117/12.3017557
Event: SPIE Optical Systems Design, 2024, Strasbourg, France
Abstract
To enhance the PETawatt Aquitaine Laser (PETAL) operation, efforts are directed towards increasing the Laser-Induced Damage Threshold (LIDT) of transport mirrors. Three approaches are being considered : i) changing the design of thin film stacks, ii) the materials, and iii) the deposition process. Monolayers of pure SiO2, HfO2, Sc2O3 and mixtures of HfO2/SiO2 and Sc2O3/SiO2 were elaborated by magnetron sputtering using oxide targets. Laser damage tests, combined with optical and physicochemical characterizations, revealed that the Sc2O3/SiO2 mixture exhibits the highest LIDT. The introduction of a small amount of oxygen into the plasma reduced the refractive index and improved the LIDT. A Bragg mirror, designed for PETAL's specifications (R > 99% at 1053 nm for s polarization at 45° incidence) is being manufactured using HfO2 (high refractive index) and Sc2O3/SiO2 (low refractive index). The films thicknesses are finely controlled with the quartz crystal microbalance technique.
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Océane Aubard, Marine Chorel, Eric G. Lavastre, Bruno Bousquet, and Corinne Marcel "Development of dielectric mirrors by magnetron sputtering for high power laser facilities.", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200I (18 June 2024); https://doi.org/10.1117/12.3017557
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KEYWORDS
Laser damage threshold
Magnetrons
Sputter deposition
Dielectric mirrors
High power lasers
Mirrors
Mixtures
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