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Back Matter
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.bm
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Abstract
This back matter contains the index and author's biography.
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KEYWORDS
Electron beam lithography
Photomasks
Illumination engineering
Image enhancement
Lithographic illumination
Lithography
Image processing
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