Optical Proximity Correction (OPC)

Ebook Topic:
Optical Proximity Correction (OPC)

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p82

Abstract

This excerpt gives a succinct explanation of Optical Proximity Correction (OPC).
Online access to SPIE eBooks is limited to subscribing institutions.

TOPIC

CITATIONS

Cited by 3 scholarly publications.

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Optical proximity correction

Photomasks

Lithography

Optical lithography

Photoresist processing

Semiconducting wafers

SRAF

Keywords/Phrases